Tantalum Sputtering Target

Tantalum Sputtering Target

Amardeep Steel is a leading supplier of high-quality Tantalum Sputtering Targets made from very pure tantalum. This ensures a consistent and reliable material. The high density of tantalum improves sputtering efficiency and helps films stick better. Tantalum also has excellent thermal stability, allowing the targets to handle extreme heat during the sputtering process, making them suitable for high-temperature applications. Its strong corrosion resistance ensures that the targets remain intact even in tough conditions. The low levels of impurities and gas in the tantalum lead to better film quality and uniformity.

Additionally, tantalum is easy to machine, allowing for precise shaping to meet specific needs. Because of these outstanding properties, Tantalum Sputtering Targets are widely used for depositing tantalum films in industries like electronics, optics, thin-film solar energy, and magnetic storage, making them essential for many sputtering processes.

Tantalum Sputtering Targets come in 8 variations, offering various sizes and orientations to fit different sputtering system setups. These high-purity tantalum discs are perfect for thin film deposition in applications like semiconductor device fabrication, optical coatings, and material surface modification. Tantalum's high melting point, good electrical conductivity, and chemical inertness make it a versatile choice for both research and industrial uses.

Discover our premium tantalum products, including pipes, tubes, flanges, and fittings, known for their exceptional durability and corrosion resistance.

Tantalum Sputtering Target Specifications

Part No. Material Size Purity
TA0201 Tantalum 1.00" Dia. x 0.125" Thick 99.95%
TA0202 Tantalum 1.00" Dia. x 0.250" Thick 99.95%
TA0203 Tantalum 2.00" Dia. x 0.125" Thick 99.95%
TA0204 Tantalum 2.00" Dia. x 0.250" Thick 99.95%
TA0205 Tantalum 3.00" Dia. x 0.250" Thick 99.95%
TA0206 Tantalum 3.00" Dia. x 0.250" Thick 99.95%
TA0207 Tantalum 4.00" Dia. x 0.250" Thick 99.95%
TA0208 Tantalum 4.00" Dia. x 0.250" Thick 99.95%
TA0209 Tantalum 5.00" Dia. x 0.250" Thick 99.95%
TA0210 Tantalum 5.00" Dia. x 0.250" Thick 99.95%

Chemical Composition of Tantalum Sputtering Target

Element R05200 (%,Max) R05400 (%,Max)
C 0.01 0.01
O 0.015 0.03
N 0.01 0.01
H 0.0015 0.0015
Fe 0.01 0.01
Mo 0.02 0.02
Nb 0.1 0.1
Ni 0.01 0.01
Si 0.005 0.005
Ti 0.01 0.01
W 0.05 0.05

Tantalum Sputtering Target Properties (Theoretical)

Molecular Weight 180.94
Appearance Silvery-gray solid
Melting Point 3017 °C
Boiling Point 5458 °C
Density 16.69 g/cm3 (20 °C)
Solubility in H2O N/A
Crystal Phase / Structure α: body-centered cubic (bcc) / β: tetragonal
Electrical Resistivity 131 nΩ·m (20 °C)
Electronegativity 1.5 Paulings
Heat of Fusion 36.57 kJ/mol
Heat of Vaporization 753 kJ/mol
Poisson's Ratio 0.34
Specific Heat 140 J/kg·K
Thermal Conductivity 57.5 W/m·K
Thermal Expansion 6.3 µm/m·K
Vickers Hardness 870–1200 MPa
Young's Modulus 186 GPa

Tantalum Sputtering Target Applications

FAQ

What is the Tantalum sputtering process?

The Tantalum sputtering process involves depositing Tantalum thin films onto a substrate, typically maintained at a temperature of about 50-200°C. The base pressure during this process is usually around 10^-8 Torr, with the argon (Ar) background gas maintained at levels between 0.2 and 10 mTorr. The sputtering power applied generally ranges from 0.1 to 10 watts per square centimeter.

What are the target materials for sputtering?

Sputtering targets are made from a variety of materials, including high-purity metals, alloys, and different types of ceramics. Common materials include metal and alloy targets, as well as ceramics such as oxides, nitrides, carbides, fluorides, silicides, sulfides, borides, selenides, tellurides, antimonides, and arsenides. Each material offers unique properties for specific applications.

What is the physical method of sputtering?

Sputtering is a physical vapor deposition (PVD) technique used to deposit thin films. In this process, material is ejected from a target and then deposited onto a substrate. Magnetron sputtering enhances this method by using a magnetic field around the target, which energizes argon atoms that bombard the target, improving the efficiency of material deposition.

What is the function of the sputtering target?

The sputtering target is the source material used to deposit functional films onto a substrate under specific conditions. These targets are widely employed in various industries, including decoration, tooling, glass production, electronics, semiconductors, and solar cells, making them vital for advanced coatings and materials.

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